adtp_v1_0.tar.gz (2.62 MB)

IonRock: software for solving strain gradients of ion-implanted semiconductors by X-ray diffraction measurements and evolutionary programming

Download (2.62 MB)
posted on 06.12.2019 by Lucas Bleicher, José Marcos Sasaki, Renata Villela Orloski, Lisandro Pavie Cardoso, Marcelo Assaoka Hayashi, Jacobus Willibrordus Swart
Abstract We present a program that uses an optimization algorithm to fit rocking curves of ion-implanted semiconductors. This is an inverse problem that cannot be solved by simple methods. However, using recursion formulae for rocking curve calculations and a model of ion distribution after implantation, it is possible to fit experimental data with a general-purpose optimization method. In our case, we use a modified version of the genetic algorithm, which has been shown to be a good technique for thi... Title of program: IonRock, version 1.0 Catalogue Id: ADTP_v1_0 Nature of problem Strain determination on ion implanted zinc-blend structure semiconductors Versions of this program held in the CPC repository in Mendeley Data ADTP_v1_0; IonRock, version 1.0; 10.1016/j.cpc.2004.02.015 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)