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IonRock: software for solving strain gradients of ion-implanted semiconductors by X-ray diffraction measurements and evolutionary programming

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posted on 06.12.2019 by Lucas Bleicher, José Marcos Sasaki, Renata Villela Orloski, Lisandro Pavie Cardoso, Marcelo Assaoka Hayashi, Jacobus Willibrordus Swart
Abstract We present a program that uses an optimization algorithm to fit rocking curves of ion-implanted semiconductors. This is an inverse problem that cannot be solved by simple methods. However, using recursion formulae for rocking curve calculations and a model of ion distribution after implantation, it is possible to fit experimental data with a general-purpose optimization method. In our case, we use a modified version of the genetic algorithm, which has been shown to be a good technique for thi... Title of program: IonRock, version 1.0 Catalogue Id: ADTP_v1_0 Nature of problem Strain determination on ion implanted zinc-blend structure semiconductors Versions of this program held in the CPC repository in Mendeley Data ADTP_v1_0; IonRock, version 1.0; 10.1016/j.cpc.2004.02.015 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2018)

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